@conference{761361,
  author = {Deane Chandler-Horowitz and Nhan Nguyen and James Ehrstein},
  title = {Assessment of Utlra-thin SiO2 Film Thickness Meaurement Precision by Ellipsometry},
  year = {2003},
  month = {2003-09-30 00:09:00},
  publisher = {Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA},
  language = {en},
}