@article{761271,
  author = {Nadine Guillaume and Richard Allen and Michael Cresswell and Markku Lahti and Loren Linholm and Mona Zaghloul},
  title = {Non-contact Electrical CD Metrology Sensor for Chrome Photomasks Featuring a Low Temperature Co-fired Ceramic Technology},
  year = {2004},
  number = {17},
  month = {2004-05-01 00:05:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}