@article{761261, author = {Emre Yarimbiyik and Harry Scahfft and Richard Allen and Mona Zaghloul}, title = {Modeling and Simulation of Nanometer Scale Copper Resistivity}, year = {2006}, number = {46}, month = {2006-07-01 00:07:00}, publisher = {Microelectronics Reliability}, language = {en}, }