@article{760971,
  author = {James Ehrstein and Curt Richter and Deane Chandler-Horowitz and Eric Vogel and Chadwin Young and Shweta Shah and Dennis Maher and Brendan Foran and Alain Diebold},
  title = {A Comparison of Thickness Values for Very Thin SiO2 Films by Using Ellipsometric, Capacitance-Voltage and HRTEM Measurements},
  year = {2006},
  number = {153},
  month = {2006-01-03 00:01:00},
  publisher = {Journal of the Electrochemical Society},
  language = {en},
}