@conference{760901,
author = {Deane Chandler-Horowitz and Paul Amirtharaj and John Stoup},
title = {High-Resolution, High-Accuracy, Mid-IR (450 cm-1 {less than or equal to} ω {less than or equal to} 4000 cm-1) Refractive Index Measurements in Silicon},
year = {1998},
month = {1998-03-01 00:03:00},
publisher = {Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
language = {en},
}