@conference{760901,
  author = {Deane Chandler-Horowitz and Paul Amirtharaj and John Stoup},
  title = {High-Resolution, High-Accuracy, Mid-IR (450 cm<sup>-1</sup> {less than or equal to} &#969; {less than or equal to} 4000 cm<sup>-1</sup>) Refractive Index Measurements in Silicon},
  year = {1998},
  month = {1998-03-01 00:03:00},
  publisher = {Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}