@conference{760866,
  author = {Safak Sayan and Mark Croft and Nhan Nguyen and Tom Emge and James Ehrstein and Igor Levin and John Suehle and Robert Bartynski and Eric Garfunkel},
  title = {The Relation between Crystalline Phase, Electronic Structure and Dielectric Properties in High-K Gate Stacks},
  year = {2005},
  month = {2005-09-28 00:09:00},
  publisher = {2005 International Conference on Characterization and Metrology for ULSI Technology, Dallas, TX, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32018},
  language = {en},
}