@article{760651, author = {Stephen Knight and Joaquin Martinez}, title = {Challenges in Metrology for the Semiconductor Industry}, year = {2005}, month = {2005-03-21 00:03:00}, publisher = {Journal of Vacuum Science and Technology B}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31889}, language = {en}, }