@conference{760271,
  author = {J. Lee and J Park and S. Krause and D. Venables and Peter Roitman},
  title = {Effect of Implantation Conditions on Defect Microstructure in Annealed SIMOX},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {Proc., Electrochemical Society International Symposium on SOI Technology and Devices, San Francisco, CA, USA},
  language = {en},
}