@article{760226,
  author = {Santos Mayo and John Fassett and H. Kingston and R. Walker},
  title = {Measurement of Vanadium Impurity in Oxygen-Implanted Silicon by Isotope Dilution and Resonance Ionization Mass Spectrometry},
  year = {1990},
  number = {62},
  month = {1990-02-01 00:02:00},
  publisher = {Analytical Chemistry},
  language = {en},
}