@misc{760141, author = {Donald Gajewski and Jonathan Guyer and Nhan Nguyen and Joseph Pellegrino}, title = {In situ Metrology During the Growth of Compound Semiconductors by Molecular Beam Epitaxy}, year = {2000}, month = {2000-02-09 00:02:00}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }