@misc{760071,
  author = {B Kolbensen and C Claeys and P Stallhofer and F Tardif and Kimberly Benton and Thomas Shaffner and D Schroder and S Kishino and P Rai-Choudhury},
  title = {Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes},
  year = {1999},
  number = {3895},
  month = {1999-10-01 00:10:00},
  publisher = {Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes},
  language = {en},
}