@conference{759981, author = {Eyal Gerecht and V. Bhupathiraju and Erich Grossman and Jeffrey Nicholson and Fernando Rodriguez-Morales and Dazhen Gu and Sigfrid Yngvesson}, title = {NbN Film Development for PHEB Devices}, year = {2002}, month = {2002-09-01 00:09:00}, publisher = {Proc., Intl Symp. on Space Terahertz Tech., Cambridge, MA, USA}, language = {en}, }