@article{759936,
author = {Yicheng Wang and Martin Misakian and Amanda Goyettes and James Olthoff},
title = {Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C2F6 and c-C4F8},
year = {2000},
month = {2000-11-01 00:11:00},
publisher = {Journal of Applied Physics},
url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=773},
language = {en},
}