@article{759701,
  author = {Brian Rennex and James Ehrstein and Robert Scace},
  title = {Methodology for the Certification of Reference Specimens for Determination of Oxygen Concentration in Semiconductor Silicon by Infrared Spectrophotometry},
  year = {1996},
  number = {143},
  month = {1996-01-01 00:01:00},
  publisher = {Journal of the Electrochemical Society},
  language = {en},
}