@conference{759686, author = {Byron Shulver and Richard Allen and Anthony Walton and Michael Cresswell and J. Stevenson and S Smith and Andrew Bunting and P. Durgapal and Alan Gundlach and Les Haworth and Alan Ross and Anthony Snell}, title = {Array Based Test Structure for Optical-Electrical Overlay Calibration}, year = {2007}, month = {2007-03-22 00:03:00}, publisher = {IEEE ICMTS International Conference on Microelectronic Test Structures, Tokyo, 1, JA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32594}, language = {en}, }