@misc{759576, author = {Donald Gajewski and Jonathan Guyer and Joseph Pellegrino}, title = {Spectroscopic Ellipsometry: In Situ Monitor and Control of III-V Semiconductors Grown by Molecular Beam Epitaxy}, year = {1999}, month = {1999-02-19 00:02:00}, publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }