@conference{759391,
  author = {Yicheng Wang and Amanda Goyettes and Martin Misakian and James Olthoff},
  title = {Mass-resolved Studies of Positive Ions in High Density Plasmas Generated in CHF3, C2F6, and CH2FCF3 and Their Mixtures with Ar},
  year = {2000},
  month = {2000-09-01 00:09:00},
  publisher = {Proc. XIII International Conference on Gas Discharges and Their Applications, Glasgow, 1, UK},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=11119},
  language = {en},
}