@conference{759271,
  author = {Richard Allen and Rathindra Ghoshtagore and Michael Cresswell and Loren Linholm},
  title = {Comparison of Properties of Electrical Test Structures Patterned in BESOI and DIMOX Films for CD Reference-Material Applications},
  year = {1998},
  number = {3332},
  month = {1998-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Inspection and Process Control XII, Undefined},
  language = {en},
}