@article{759226,
  author = {Jihui Yang and Joseph Kopanski and A Postula and M Bialkowski},
  title = {Experimental investigation of interface states and photovoltaic effects on the scanning capacitance microscopy measurement for p-n junction dopant profiling},
  year = {2004},
  number = {45},
  month = {2004-12-20 00:12:00},
  publisher = {Microelectronics Reliability},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31743},
  language = {en},
}