@conference{759136,
  author = {Ankush Varma and Muhammad Afridi and Akin Akturk and Paul Klein and Allen Hefner Jr. and Bruce Jacob},
  title = {Modeling MEMS Microhotplate Structures With SystemC},
  year = {2006},
  month = {2006-10-25 00:10:00},
  publisher = {INTERNATIONAL CONFERENCE ON COMPILERS, ARCHITECTURE, AND SYNTHESIS FOR EMBEDDED SYSTEMS, Seoul, 1, KS},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32318},
  language = {en},
}