@conference{758996,
  author = {Richard Allen and Heather Patrick and Michael Bishop and Thomas Germer and Ronald Dixson and William Gutherie and Michael Cresswell},
  title = {Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications},
  year = {2007},
  month = {2007-03-22 00:03:00},
  publisher = {IEEE ICMTS International Conference on Microelectronic Test Structures, Tokyo, 1, JA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32593},
  language = {en},
}