@article{758911, author = {Hao Xiong and Dawei Heh and Moshe Gurfinkel and Qiliang Li and Yoram Shapira and Curt Richter and Gennadi Bersuker and Choi Rino and John Suehle}, title = {Characterization of Electrically Active Defects in High-K Gate Dielectrics By Using Low Frequency Noise, Charge Pumping, and Fast Id-Vg measurements}, year = {2007}, number = {84}, month = {2007-09-30 00:09:00}, publisher = {Materials Science and Engineering A-Structural Materials Properties Microstructure and Processing}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32633}, language = {en}, }