@conference{758846, author = {Ya-Shian Li-Baboud and Brad Van Eck and Eric Simmon}, title = {Running Out of Time: Improvements Required In Current Semiconductor Factory and Equipment Clock Synchronization for Supporting Future Real-Time Data Collection}, year = {2004}, month = {2004-09-23 00:09:00}, publisher = {AEC/APC Symposium XVI, Westminster, CO, USA}, language = {en}, }