@conference{758796,
  author = {Richard Allen and Amy Hunt and Christine Murabito and Brandon Park and William Guthrie and Michael Cresswell},
  title = {Extraction of Critical Dimension Reference Feature CDs from New Test Structure Using HRTEM Imaging},
  year = {2005},
  month = {2005-04-18 00:04:00},
  publisher = {ICMTS IEEE International Conference on Microelectronic Test Structures, Leuven, 1, BE},
  language = {en},
}