@article{758676,
  author = {Y. Hong and Tong Yeow and W. Chim and K. Wong and Joseph Kopanski},
  title = {Influence of Interface Traps and Surface Mobility Degradation on Scanning Capacitance Microscopy Measurement},
  year = {2004},
  number = {51},
  month = {2004-09-01 00:09:00},
  publisher = {IEEE Transactions on Electron Devices},
  language = {en},
}