@conference{758671,
  author = {Amanda Goyettes and Yicheng Wang and James Olthoff},
  title = {Comparison of the Identities, Fluxes, and Energies of Ions Formed in High Density Fluorocarbon Discharges},
  year = {2001},
  month = {2001-01-01 00:01:00},
  publisher = {Proc. of Characterization and Metrology for ULSI Technology 2000 Intl. Conf., Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=2759},
  language = {en},
}