@article{758511,
  author = {Kristine Bertness and C. Wang and Marc Salit and Gregory Turk and Therese Butler and Albert Paul and Larry Robins},
  title = {High-accuracy determination of epitaxial AlGaAs composition with inductively coupled plasma optical emission spectroscopy},
  year = {2006},
  number = {24},
  month = {2006-03-01 00:03:00},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32020},
  language = {en},
}