@conference{758356, author = {James Moyne and Jonathan Parrott and Naveen Kalappa and Ya-Shian Li-Baboud}, title = {Practical Aspects Impacting Time Synchronization Data Quality in Semiconductor Manufacturing}, year = {2006}, month = {2006-09-30 00:09:00}, publisher = {AEC/APC Symposium XVIII, Westminster, CO, USA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32428}, language = {en}, }