@article{758196,
  author = {Stephen Knight and Ronald Dixon and Ronald Jones and Eric Lin and Ndubuisi Orji and Richard Silver and Andras Vladar and Wen-Li Wu},
  title = {Advanced Metrology Needs for Nanoelectronics Lithography},
  year = {2006},
  number = {7},
  month = {2006-10-01 00:10:00},
  publisher = {Journal De Physique Iii},
  language = {en},
}