@conference{758016,
  author = {Thomas Wallis and Atif Imtiaz and Hans Nembach and Paul Rice and Pavel Kabos},
  title = {Metrology for High-Frequency Nanoelectronics},
  year = {2007},
  month = {2007-03-27 00:03:00},
  publisher = {2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (formerly titled Characterization and Metrology for ULSI Technology), Gaithersburg, MD, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32626},
  language = {en},
}