@conference{757961,
  author = {Richard Allen and Ronald Dixson and Michael Cresswell and William Gutherie and Byron Shulver and Andrew Bunting and J. Stevenson and Anthony Walton},
  title = {CD Reference Materials Fabricated on Monolithic 200 mm Wafers for Automated Metrology Tool Applications},
  year = {2007},
  month = {2007-09-30 00:09:00},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32654},
  language = {en},
}