@conference{757676, author = {Emre Yarimbiyik and Harry Schafft and Richard Allen and Mona Zahgoul and David Blackburn}, title = {Resistivity of Nanometer-Scale Films and Interconnects: Model and Simulation}, year = {2005}, month = {2005-10-20 00:10:00}, publisher = {IEEE International Integrated Reliability Workshop Final Report, Lake Tahoe, CA, USA}, language = {en}, }