@article{757466, author = {Michelle Chabot and John Moreland and Lan Gao and Sy-hwang Liou and C. Miller}, title = {Novel Fabrication of Micromechanical Oscillators With Nanoscale Sensitivity at Room Temperature}, year = {2005}, number = {14}, month = {2005-10-05 00:10:00}, publisher = {Journal of Microelectromechanical Systems}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31632}, language = {en}, }