@article{757341, author = {Janet Cassard and David Herman and Paul Vernier and Don DeVoe and Michael Gaitan}, title = {Young's Modulus Measurements in Standard IC CMOS Processes using MEMS Test Structures}, year = {2007}, number = {28}, month = {2007-11-01 00:11:00}, publisher = {IEEE Electron Device Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32659}, language = {en}, }