@article{757071,
  author = {J Schneir and T Mcwaid and J Alexander and B Wilfley},
  title = {Design of an Atomic Force Microscope with Interferometric Position Control},
  year = {1994},
  number = {12(6)},
  month = {1994-08-19 00:08:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}