@conference{756876,
  author = {J Schneir and T Mcwaid and Ronald Dixson and V Tsai and John Villarrubia and Edwin Williams and E Fu},
  title = {Progress on Accurate Metrology of Pitch, Height, Roughness, and Width Artifacts Using an Atomic Force Microscope},
  year = {1995},
  number = {2439},
  month = {1995-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Santa Clara, CA, USA},
  language = {en},
}