@conference{756866,
  author = {James Gilsinn and Hui Zhou and Bradley Damazo and Joseph Fu and Richard Silver},
  title = {Nano-Lithography in Ultra-High Vacuum (UHV) for Real World Applications},
  year = {2004},
  month = {2004-03-11 00:03:00},
  publisher = {Proceedings of Nanotech 2004, Boston, MA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822480},
  language = {en},
}