@conference{756591, author = {W Tan and Robert Allen and Michael Cresswell and Christine Murabito and B Park and Ronald Dixson and William Guthrie}, title = {Comparison of SEM and HRTEM CD-Measurements Extracted From Monocrystalline Tes-Structures Having Feature Linewidths From 40 nm to 240 nm}, year = {2005}, month = {2005-04-04 00:04:00}, publisher = {International Conference on Microelectronic Test Structures, Leuven, 1, BE}, language = {en}, }