@conference{756576,
  author = {Michael Cresswell and William Penzes and Robert Allen and L Linholm and C Ellenwood and E Teague},
  title = {Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards},
  year = {1994},
  number = {2196},
  month = {1994-05-01 00:05:00},
  publisher = {Proceedings of SPIE, San Jose, CA, USA},
  language = {en},
}