@conference{756571,
  author = {Richard Silver and James Potzick and Fredric Scire and Christopher Evans and Michael McGlauflin and Edward Kornegay and Robert Larrabee},
  title = {A Method to Characterize Overlay Tool Misalignments and Distortions},
  year = {1997},
  number = {3050},
  month = {1997-07-01 00:07:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XI, Susan K. Jones, Editor, Santa Clara, CA, USA},
  language = {en},
}