@article{756366,
  author = {O Wells and Michael Postek},
  title = {Detector Strategy for the Scanning Electron Microscope Inspection and Metrology of Semiconductor Wafers},
  year = {1999},
  number = {21(2)},
  month = {1999-03-01 00:03:00},
  publisher = {Scanning},
  language = {en},
}