@article{756301, author = {F Chien and W Hsieh and S Gwo and Andras Vladar and John Dagata}, title = {Silicon Nanostructures Fabricated by Scanning Probe Oxidation and Tetramethyl Ammonium Hydroxide Etching}, year = {2002}, number = {91(12)}, month = {2002-06-15 00:06:00}, publisher = {Journal of Applied Physics}, language = {en}, }