@conference{756286,
  author = {Bradley Damazo and James Gilsinn and Richard Silver and Hui Zhou},
  title = {A Macro-Micro Motion System for a STM},
  year = {2002},
  month = {2002-06-13 00:06:00},
  publisher = {World Automation Congress (WAC) 2002 as Part of the International Symposium on Robotics & Applications (ISORA), Orlando, FL, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821683},
  language = {en},
}