@conference{756276,
  author = {Egon Marx and I Malik and Y Strausser and T Bristow and N Poduje and J Stover},
  title = {Round Robin Determination of Power Spectral Densities of Different Si Wafer Surfaces},
  year = {1998},
  number = {3275},
  month = {1998-03-01 00:03:00},
  publisher = {Proceedings of SPIE, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, John C. Stover, Editor, San Jose, CA, USA},
  language = {en},
}