@conference{756246,
  author = {B Newell and Michael Postek and J VanDerZiel},
  title = {Application of the Prototype NIST SRM 2090a SEM Magnification Standard in a Manufacturing Environment},
  year = {1995},
  number = {2640},
  month = {1995-09-01 00:09:00},
  publisher = {Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor, Austin, TX, USA},
  language = {en},
}