@conference{756211,
  author = {Ronald Dixson and N. Sullivan and J Schneir and T Mcwaid and V Tsai and J Prochazka and M. Young},
  title = {Measurement of a CD and Sidewall Angle Artifact with Two Dimensional CD AFM Metrology},
  year = {1996},
  number = {2725},
  month = {1996-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography X, Susan K. Jones, Editor, , USA},
  language = {en},
}