@conference{756081,
  author = {Ronald Dixson and Theodore Vorburger and P Sullivan and V Tsai and T Mcwaid},
  title = {Toward Accurate Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated AFM},
  year = {1996},
  number = {14},
  month = {1996-01-01 00:01:00},
  publisher = {Proceedings of American Society for Precision Engineering, , USA},
  language = {en},
}