@conference{755971,
  author = {Ronald Dixson and J Schneir and T Mcwaid and N. Sullivan and V Tsai and S Zaidi and S Brueck},
  title = {Toward Accurate Linewidth Metrology Using Atomic Force Microscopy and Tip Characterization},
  year = {1996},
  number = {2725},
  month = {1996-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography X, Susan K. Jones, Editor, Santa Clara, CA, USA},
  language = {en},
}