@article{755876,
  author = {Michael Postek and J Lowney and Andras Vladar and William Keery and Egon Marx and Robert Larrabee},
  title = {Electron Beam Interaction Modeling as Applied to X-Ray Lithography Mask SEM Linewidth Metrology},
  year = {1994},
  number = {16, Supp. IV},
  month = {1994-01-01 00:01:00},
  publisher = {Scanning},
  language = {en},
}