@article{755861, author = {Samuel Jones and Robert Larrabee and Michael Postek and Andras Vladar and Nien Zhang}, title = {Image Sharpness Measurement in Scanning Electron Microscope - Part III}, year = {1999}, number = {21(4)}, month = {1999-07-01 00:07:00}, publisher = {Scanning}, language = {en}, }